Investigation of the Surface Integrity of Precision Machined Single Cry Stal Silicon
نویسندگان
چکیده
C. L. Chao1, K. J. Ma2, S.C. Sheu2, H. Y . Lin3 and F. Y . Chang3 1 Department of Mechanical Engineering, E790, Tam-Kang University, No.151 Y ing-Chuan Road, Tamsui, Taipei Hsien-251, Taiwan, R.O.C (Email: [email protected]) 2 Department of Mechanical Engineering, Chung-Cheng Institute of Technology, Ta-Hsi, Taoyuan, Taiwan-335, R.O.C. 3 MEMS Division, MIRL, Industrial Technology Research Institute, Chu-Tung, Hsin-Chu, Taiwan310, R.O.C.
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